Fabrication of high contrast gratings (HCG) MEMS-tunable 1060 nm VCSELs with 32 nm electrostatic tuning range

  • Philippe Martin Baguio Tingzon Materials Science and Engineering Program, University of the Philippines Diliman
  • Neil Irvin Cabello National Institute of Physics, University of the Philippines Diliman
  • John Jairus Eslit Electrical and Electronics Engineering Institute, University of the Philippines Diliman
  • Kevin Cook Department of Electrical Engineering and Computer Sciences, University of California, Berkeley
  • Jonas Kapraun Department of Electrical Engineering and Computer Sciences, University of California, Berkeley
  • Marc Rosales Electrical and Electronics Engineering Institute, University of the Philippines Diliman
  • Armando Somintac National Institute of Physics, University of the Philippines Diliman
  • Arnel Salvador National Institute of Physics, University of the Philippines Diliman
  • Elmer Estacio National Institute of Physics, University of the Philippines Diliman
  • Connie Chang-Hasnain Department of Electrical Engineering and Computer Sciences, University of California, Berkeley

Abstract

We report the fabrication of a 1060 nm high contrast grating (HCG) microelectromechanical system (MEMS)-tunable vertical cavity surface emitting laser (VCSEL). An electrostatic tuning range of 32 nm was achieved. A mechanical resonant frequency at around 440 kHz was achieved via dynamic actuation of the MEMS, an f$_{3dB}$ at around 700 kHz with a quality factor of 2.33.

Published
2018-05-25
How to Cite
[1]
P. M. Tingzon, N. I. Cabello, J. J. Eslit, K. Cook, J. Kapraun, M. Rosales, A. Somintac, A. Salvador, E. Estacio, and C. Chang-Hasnain. Fabrication of high contrast gratings (HCG) MEMS-tunable 1060 nm VCSELs with 32 nm electrostatic tuning range, Proceedings of the Samahang Pisika ng Pilipinas 36, SPP-2018-1G-04 (2018). URL: https://paperview.spp-online.org/proceedings/article/view/SPP-2018-1G-04.
Section
Condensed Matter and Materials Science