Dynamic Spectro-Polarimetry/Ellipsometry: Theory and applications

  • Daesuk Kim Department of Mechanical System Engineering, Chonbuk National University

Abstract

In this talk, we describe Dynamic Spectro-Polarimetry/Ellipsometry, which is based on snapshot spectral interferometric polarization modulation. The proposed Dynamic SP/SE can extract the spectral phase difference between p- and s-polarization of the transmitted/reflected wave from periodic nanopatterns or thin films. DSP/DSE has no moving parts, and it is extremely robust to external vibration although it employs an interferometric scheme due to its unique optical design. Dynamic spectro-polarization measurement capability is demonstrated for anisotropic objects such as achromatic quarter-wave plates and periodic nanopatterned objects by extracting the spectral Stokes vector in real time speed. High precision and high speed capability make the proposed system ideal for large-scale real-time process monitoring and control in various applications of semiconductor and display manufacturing fields.

About the Speaker

Daesuk Kim received his PhD in Mechanical Engineering from the Korea Advanced Institute of Science and Technology (KAIST) in 2002. He worked as a postdoctoral associate at the Department of Electrical and Computer Engineering of the University of Connecticut until 2004. He then moved to Samsung Electronics and worked with the Micronano Technology Team up to 2007. In April 2007 he became an assistant professor at the Department of Mechanical System Engineering of Chonbuk National University in Korea and since May 2016 held a professor position at the same department. For the last 20 years, his main research interests have been in optical metrology for micro- and nano-regimes, which include Dynamic Spectro-Ellipsometry/Polarimetry, real time phase sensitive 3D metrology such as Digital Holography and dispersive Interferometry, phase-sensitive bio-sensing, and optoelectronic devices such as high brightness LED and ultra-precision actuation systems. Recently, his group is focusing more on polarization-sensitive Dynamic phase measurement fields creating new concepts by combining spectroscopic polarimetry and digital holography. In addition to his various academic backgrounds, he also strong industrial experiences associated with the information technology and biotechnology industries. More recently, he is working on the commercialization of the patented Dynamic spectroscopic polarization measurement technology.

Published
2018-03-02
How to Cite
[1]
D. Kim. Dynamic Spectro-Polarimetry/Ellipsometry: Theory and applications, Proceedings of the Samahang Pisika ng Pilipinas 36, SPP-2018-INV-2A-01 (2018). URL: https://paperview.spp-online.org/proceedings/article/view/SPP-2018-INV-2A-01.