Fabrication and characterization of MIM micro-capacitor

Authors

  • Maria Emma Villamin ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Ronel Christian Roca ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Fritz Christian Awitan ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Jonathan Azares ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Jennifer Anne Constantino ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Michael Defensor ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Armando Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Arnel Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Marc Rosales ⋅ PH Department of Electrical and Electronics Engineering, University of the Philippines Diliman

Abstract

A metal-insulator-metal (MIM) micro-capacitor for monolithic microwave integrated circuit (MMIC) applications was successfully fabricated at the Condensed Matter Physics Laboratory. The measured capacitance of the device, with area of 200µm × 200µm, is around ~1.7pF and a Q-factor of as high as 20 at 70MHz. The self resonant frequency of the capacitor is very far from its operating frequency which allows almost ideal behavior in the microwave range.

[Reprinted from: ME Villamin, RC Roca, FC Awitan, J Azares, JA Constantino, M Defensor, A Somintac, A Salvador, and M Rosales, "Fabrication and characterization of MIM micro-capacitor," in Proceedings of the 26th Samahang Pisika ng Pilipinas Physics Congress (Baguio City, 2008), SPP-2008-3A-01.]

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Published

2008-10-01

Issue

Vol. 2 No. 1: October 2008

Section

Brief Communications