Authors
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Maria Emma Villamin
⋅ PH
National Institute of Physics, University of the Philippines Diliman
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Ronel Christian Roca
⋅ PH
National Institute of Physics, University of the Philippines Diliman
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Fritz Christian Awitan
⋅ PH
National Institute of Physics, University of the Philippines Diliman
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Jonathan Azares
⋅ PH
National Institute of Physics, University of the Philippines Diliman
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Jennifer Anne Constantino
⋅ PH
National Institute of Physics, University of the Philippines Diliman
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Michael Defensor
⋅ PH
National Institute of Physics, University of the Philippines Diliman
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Armando Somintac
⋅ PH
National Institute of Physics, University of the Philippines Diliman
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Arnel Salvador
⋅ PH
National Institute of Physics, University of the Philippines Diliman
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Marc Rosales
⋅ PH
Department of Electrical and Electronics Engineering, University of the Philippines Diliman
Abstract
A metal-insulator-metal (MIM) micro-capacitor for monolithic microwave integrated circuit (MMIC) applications was successfully fabricated at the Condensed Matter Physics Laboratory. The measured capacitance of the device, with area of 200µm × 200µm, is around ~1.7pF and a Q-factor of as high as 20 at 70MHz. The self resonant frequency of the capacitor is very far from its operating frequency which allows almost ideal behavior in the microwave range.
