Design and fabrication of a DC magnetron sputtering system

Authors

  • Herwin Jerome Unidad ⋅ PH Department of Physics, Ateneo de Manila University
  • Ivan Culaba ⋅ PH Department of Physics, Ateneo de Manila University

Abstract

A DC magnetron sputtering system was designed and developed. The glow discharge profile as a function of current, voltage and pressure; discharge shape; stability; and Paschen curve are presented. Secondary arcs in the discharge were observed to change in size and brightness as pressure varied and brightness of the glow discharge was observed to increase at certain pressures a result that is critical for system use in sputter deposition.

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Published

2007-10-01

Issue

Vol. 1 No. 1: October 2007

Section

Brief Communications