Fabrication and characterization of multilayered porous polycrystalline Silicon

Authors

  • Joybelle Lopez Materials Science and Engineering Program, University of the Philippines Diliman
  • Maria Angela Faustino Materials Science and Engineering Program, University of the Philippines Diliman
  • Lorenzo Lopez Materials Science and Engineering Program, University of the Philippines Diliman
  • Arven Cafe National Institute of Physics, University of the Philippines Diliman
  • Arnel Salvador National Institute of Physics, University of the Philippines Diliman
  • Armando Somintac National Institute of Physics, University of the Philippines Diliman

Abstract

Fabrication and characterization of porous polycrystalline silicon were presented. The effects of varying supplied anodic current and number of stacking periodic layers during the electrochemical etching of the samples were investigated. By varying the anodic currents, the calculated refractive indices from the reflectivity results were 1.334, 1.168 and 1.093 with porosities of 0.802, 0.885 and 0.931, respectively. On the other hand, varying the number of layers stacking pairs yielded refractive indices of 1.280, 1.294 and 1.289 with porosities of 0.827, 0.820 and 0.823, respectively. With these values, it can be concluded that changing the supplied anodic current changes the samples properties; and varying the number of layers does not.

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Issue

Article ID

SPP2013-PA-18

Section

Poster Session PA

Published

2013-10-23

How to Cite

[1]
J Lopez, MA Faustino, L Lopez, A Cafe, A Salvador, and A Somintac, Fabrication and characterization of multilayered porous polycrystalline Silicon, Proceedings of the Samahang Pisika ng Pilipinas 31, SPP2013-PA-18 (2013). URL: https://proceedings.spp-online.org/article/view/SPP2013-PA-18.