Optical diagnostics of vibrationally excited molecules in hydrogen plasma of 14GHz ECR condition

Authors

Tomoya Ichikawa Graduate School of Engineering, Doshisha University
Hiroshi Takemura Graduate School of Engineering, Doshisha University
Toshiro Kasuya Graduate School of Engineering, Doshisha University
Yasuyuki Kimura Graduate School of Engineering, Doshisha University
Masaki Nishiura Graduate School of Science and Engineering, Doshisha University
Motoi Wada Graduate School of Engineering, Doshisha University

Abstract

Formation rate of vibrationally excited hydrogen molecules (H₂^*) in a cone-shaped magnetic filter field of an electron cyclotron resonance (ECR) ion source has been investigated by vacuum ultraviolet (VUV) spectroscopy. The spectrum around 121.57 nm peak of Lyman – α was observed up to 162 nm wavelength. The intensity of the band spectrum in the wavelength range has been observed by changing the input microwave power and the gas pressure. Its correlation to the negative hydrogen ion (H^-) production is discussed.

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Issue

2013: Proceedings of the 31st Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP2013-1C-4

Section

Plasma Physics

Published

2018-07-30

How to Cite

[1]

T Ichikawa, H Takemura, T Kasuya, Y Kimura, M Nishiura, and M Wada, Optical diagnostics of vibrationally excited molecules in hydrogen plasma of 14GHz ECR condition, Proceedings of the Samahang Pisika ng Pilipinas 31, SPP2013-1C-4 (2018). URL: https://proceedings.spp-online.org/article/view/SPP2013-1C-4.