Formation of low energy electron beam by wire mesh extraction electrodes

Authors

Ayu Mizoguchi Graduate School of Engineering, Doshisha University
Toshiro Kasuya Graduate School of Engineering, Doshisha University
Motoi Wada Graduate School of Engineering, Doshisha University
Michikazu Kinsho Graduate School of Engineering, Doshisha University
Masahiro Yoshimoto Graduate School of Engineering, Doshisha University

Abstract

The performance of wire mesh electrodes to extract low energy electron beam less than 200 eV from discharge plasma has been investigated. The pair of wire mesh extraction electrodes has been inserted between the plasma source and a
vacuum chamber. The electrode is made of 0.1 mm diameter tungsten wires that are lined parallel and separated by 1 mm. The extraction hole diameter is 23 mm. The extraction system has created electron density greater than 10^-6 A/cm^-3
at a location several cm distant from the extractor. The maximum value of electron beam density has been measured 1.1×10^-3 A/cm²

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Issue

2013: Proceedings of the 31st Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP2013-1C-3

Section

Plasma Physics

Published

2013-10-23

How to Cite

[1]

A Mizoguchi, T Kasuya, M Wada, M Kinsho, and M Yoshimoto, Formation of low energy electron beam by wire mesh extraction electrodes, Proceedings of the Samahang Pisika ng Pilipinas 31, SPP2013-1C-3 (2013). URL: https://proceedings.spp-online.org/article/view/SPP2013-1C-3.