Fabrication and characterization of zinc oxide thin films through spray pyrolysis technique

Authors

Jefferson Abrenica National Institute of Physics, University of the Philippines Diliman
Annaliza Amo National Institute of Physics, University of the Philippines Diliman
Heinritz Miguel National Institute of Physics, University of the Philippines Diliman
Armando Somintac National Institute of Physics, University of the Philippines Diliman
Arnel Salvador National Institute of Physics, University of the Philippines Diliman

Abstract

Zinc Oxide (ZnO) thin films were deposited on P-type silicon (100) substrates using spray pyrolysis technique with varying substrate temperature and deposition time. X-ray diffraction (XRD) results showed that the crystallinity changes with substrate temperature. It also confirm that the film deposited at 300 0C has a hexagonal wurtzite structure with preferential orientation along (002) plane. The Scanning Electron Microscopy (SEM) images revealed that film has a continuous and dense structure and that varying the substrate temperature and the deposition time changes the surface morphology and thickness respectively.

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Issue

2012: Proceedings of the 30th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP2012-PB-12

Section

Poster Session PB

Published

2012-10-22

How to Cite

[1]

J Abrenica, A Amo, H Miguel, A Somintac, and A Salvador, Fabrication and characterization of zinc oxide thin films through spray pyrolysis technique, Proceedings of the Samahang Pisika ng Pilipinas 30, SPP2012-PB-12 (2012). URL: https://proceedings.spp-online.org/article/view/SPP2012-PB-12.