Comparison of single focus and dual foci scanning in single-photon photopolymerization

  • Eric Joshua Vincent Capuloy Reyes National Institute of Physics, University of the Philippines Diliman
  • Wynn Dunn Gil Dugang Improso National Institute of Physics, University of the Philippines Diliman
  • Giovanni Alarkon Tapang National Institute of Physics, University of the Philippines Diliman

Abstract

The photopolymerization of a single focus, and a dual focal scanner setup were simulated in order to compare their performance in a photolithography line scan. The baseline behavior of a stationary focus was first observed and analyzed. From this, the size growth behavior for the two systems were compared. It was observed that the single focus line scan is able to produce smoother line scans in exchange for less size control. Meanwhile, the dual focus setup is able to have more control at the cost of fringed surfaces.

Published
2020-09-14
How to Cite
[1]
E. J. V. Reyes, W. D. G. Improso, and G. Tapang. Comparison of single focus and dual foci scanning in single-photon photopolymerization, Proceedings of the Samahang Pisika ng Pilipinas 38, SPP-2020-4C-03 (2020). URL: https://paperview.spp-online.org/proceedings/article/view/SPP-2020-4C-03.
Section
Instrumentation, Imaging, and Signal Processing