Stress analysis of a four-legs actuator type MEMS on a 1060 nm HCG-MEMS Tunable VCSEL

  • Philippe Martin Tingzon Materials Science and Engineering Program, University of the Philippines Diliman
  • Neil Irvin Cabello National Institute of Physics, University of the Philippines Diliman
  • Horace Andrew Husay National Institute of Physics, University of the Philippines Diliman
  • John Jairus Eslit Electrical and Electronics Engineering Institute, University of the Philippines Diliman
  • Jonas Kapraun Department of Electrical Engineering and Computer Sciences, University of California Berkeley, USA
  • Armando Somintac National Institute of Physics, University of the Philippines Diliman
  • Arnel Salvador National Institute of Physics, University of the Philippines Diliman
  • Constance Chang-Hasnain Department of Electrical Engineering and Computer Sciences, University of California Berkeley, USA
  • Elmer Estacio National Institute of Physics, University of the Philippines Diliman

Abstract

We report on the stress experienced by a four-leg actuator type design of a 1060 nm high contrast grating (HCG) tunable vertical cavity surface emitting laser (VCSEL). With increasing tuning bias, we observed an increasing Raman shift for the GaAs TO phonon Raman peak implying an increase in tensile stress experienced by the microelectromechanical systems (MEMS) of up to 0.48 GPa.

Published
2019-05-21
How to Cite
[1]
P. M. Tingzon, N. I. Cabello, H. A. Husay, J. J. Eslit, J. Kapraun, A. Somintac, A. Salvador, C. Chang-Hasnain, and E. Estacio. Stress analysis of a four-legs actuator type MEMS on a 1060 nm HCG-MEMS Tunable VCSEL, Proceedings of the Samahang Pisika ng Pilipinas 37, SPP-2019-PA-14 (2019). URL: https://paperview.spp-online.org/proceedings/article/view/SPP-2019-PA-14.