Multifunctional sensor based on piezoresistive property of zinc oxide film for strain and temperature monitoring
We fabricated a multifunctional sensor for strain and temperature measurement based on ZnO film deposited on kapton film. Raman spectroscopy confirmed the growth of ZnO wurtzite crystal structure. Results from cantilever set-up with peltier module shows a linear dependence between resistance and strain which is in agreement with the gauge relationship between relative resistance and strain. Gauge factor was found to be in the range of 16.01 to 25.05. Excellent repeatability and stability with fast response time in the range of 10ms-12ms were achieved. Similar device performance was also found at different temperature.