Multifunctional sensor based on piezoresistive property of zinc oxide film for strain and temperature monitoring

  • Aldrin S Bendal Materials Science and Engineering Program, University of the Philippines Diliman
  • Arven I Cafe Materials Science and Engineering Program, University of the Philippines Diliman
  • Horace Andrew F Husay National Institute of Physics, University of the Philippines Diliman
  • Elmer S Estacio National Institute of Physics, University of the Philippines Diliman
  • Arnel A Salvador National Institute of Physics, University of the Philippines Diliman
  • Armando S Somintac National Institute of Physics, University of the Philippines Diliman

Abstract

We fabricated a multifunctional sensor for strain and temperature measurement based on ZnO film deposited on kapton film. Raman spectroscopy confirmed the growth of ZnO wurtzite crystal structure. Results from cantilever set-up with peltier module shows a linear dependence between resistance and strain which is in agreement with the gauge relationship between relative resistance and strain. Gauge factor was found to be in the range of 16.01 to 25.05. Excellent repeatability and stability with fast response time in the range of 10ms-12ms were achieved. Similar device performance was also found at different temperature.

Published
2018-06-01
How to Cite
[1]
A. Bendal, A. Cafe, H. A. Husay, E. Estacio, A. Salvador, and A. Somintac. Multifunctional sensor based on piezoresistive property of zinc oxide film for strain and temperature monitoring, Proceedings of the Samahang Pisika ng Pilipinas 36, SPP-2018-PC-50 (2018). URL: https://paperview.spp-online.org/proceedings/article/view/SPP-2018-PC-50.
Section
Poster Session C (Mathematical Physics, Optics, and Interdisciplinary Topics)