Stability and sensitivity of ammonia sensor based on porous silicon coated tin oxide

  • Michaelrey Cainglet Materials Science and Engineering Program, University of the Philippines Diliman
  • Arnel A. Salvador National Institute of Physics, University of the Philippines Diliman
  • Armando S. Somintac National Institute of Physics, University of the Philippines Diliman

Abstract

Porous silicon (pSi) with 86% porosity was fabricated from arsenic doped crystalline silicon wafer with (100) orientation. Porous silicon layers were produced via electrochemical anodization of Si wafer. After anodization, tin oxide (SnO2) was sprayed onto the surface of pSi. Then, aluminum (Al) contacts were deposited on the surface of pSi coated tin oxide via rf magnetron sputtering for electrical connection. The response of the fabricated sensor to ammonia vapor with different concentration was studied. The sensitivity and the stability of the sensor have been characterized and analyzed as a function of gas concentration and incubation period.

Published
2018-06-02
How to Cite
[1]
M. Cainglet, A. Salvador, and A. Somintac. Stability and sensitivity of ammonia sensor based on porous silicon coated tin oxide, Proceedings of the Samahang Pisika ng Pilipinas 36, SPP-2018-PA-51 (2018). URL: https://paperview.spp-online.org/proceedings/article/view/SPP-2018-PA-51.
Section
Poster Session A (Materials Science, Instrumentation, and Photonics)