Fabrication of wavelength-tunable and small-signal modulated VCSEL emitting at the 850 nm regime

  • Anthony Rustia Tuico Materials Science and Engineering Program, University of the Philippines Diliman
  • Philippe Martin Tingzon Materials Science and Engineering Program, University of the Philippines Diliman
  • Elizabeth Ann Prieto National Institute of Physics, University of the Philippines Diliman
  • Kevin Cook Department of Electrical Engineering and Computer Sciences, University of California, Berkeley
  • Marc Rosales Electrical and Electronics Engineering Institute, University of the Philippines Diliman
  • Armando Somintac National Institute of Physics, University of the Philippines Diliman
  • Arnel Salvador National Institute of Physics, University of the Philippines Diliman
  • Elmer Estacio National Institute of Physics, University of the Philippines Diliman
  • Connie Chang-Hasnain Department of Electrical Engineering and Computer Sciences, University of California, Berkeley

Abstract

We report on the fabrication of an oxide-confined 850 nm VCSEL capable of wavelength tuning and small-signal modulation. The wavelength tuning is enabled by actuating a suspended high-contrast grating (HCG) with micro-electro-mechanical structures (MEMS). A resonant frequency up to 6.3 GHz was obtained by small-signal modulation on the fabricated VCSEL with all-top metal contact. The integration of wavelength tuning and high direct-modulation speed in a single VCSEL is deemed promising for high speed data communication applications.

Published
2018-05-26
How to Cite
[1]
A. Tuico, P. M. Tingzon, E. A. Prieto, K. Cook, M. Rosales, A. Somintac, A. Salvador, E. Estacio, and C. Chang-Hasnain. Fabrication of wavelength-tunable and small-signal modulated VCSEL emitting at the 850 nm regime, Proceedings of the Samahang Pisika ng Pilipinas 36, SPP-2018-3C-03 (2018). URL: https://paperview.spp-online.org/proceedings/article/view/SPP-2018-3C-03.
Section
Condensed Matter and Materials Science