Surface morphology of IR-PLD grown Bi₂Sr₂CaCu₂O_8+δ thin films etched by hydrochloric acid (HCl) solution

Authors

Jeffrey C. de Vero National Institute of Physics, University of the Philippines Diliman
FB Awitan National Institute of Physics, University of the Philippines Diliman
Wilson O. Garcia National Institute of Physics, University of the Philippines Diliman
Roland V. Sarmago National Institute of Physics, University of the Philippines Diliman

Abstract

We report on the effect of using chemical etchant on the surface morphology of superconducting Bi-2212 films grown by IR-PLD. Wet chemical etching was employed via immersion of the samples on diluted solutions of hydrochloric acid (HCl) in order to define a bowtie structure prepared via standard photolithography. Other etchants such as phosphoric acid (H₃PO₄), and potassium chloride (KCl) were also used. Surface morphology of the samples was then observed after the process. Significant etching was observed on HCl immersed sample as compared to samples immersed in H₃PO₄, and KCl. However prolonged etching in HCl resulted to deterioration in the surface morphology of the samples.

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Issue

2010: Proceedings of the 28th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2010-PA-11

Section

Poster Session PA

Published

2010-10-25

How to Cite

[1]

JC de Vero, F Awitan, WO Garcia, and RV Sarmago, Surface morphology of IR-PLD grown Bi₂Sr₂CaCu₂O8+δ thin films etched by hydrochloric acid (HCl) solution, Proceedings of the Samahang Pisika ng Pilipinas 28, SPP-2010-PA-11 (2010). URL: https://proceedings.spp-online.org/article/view/SPP-2010-PA-11.