Characterization of extremely thick macroporous silicon layer synthesized via electrochemical etching

Authors

  • Rhona Olivia M. Gonzales National Institute of Physics, University of the Philippines Diliman
  • Roma S. Lopez Department of Physical Science, Polytechnic University of the Philippines
  • Jobelle J. Gimeno Department of Physical Science, Polytechnic University of the Philippines
  • Ryan T. Diocampo Department of Physical Science, Polytechnic University of the Philippines
  • Neil Irvin F. Cabello National Institute of Physics, University of the Philippines Diliman
  • Arvin I. Mabilangan National Institute of Physics, University of the Philippines Diliman
  • Rogelio G. Dizon Department of Physical Science, Polytechnic University of the Philippines
  • Armando S. Somintac National Institute of Physics, University of the Philippines Diliman

Abstract

Extremely thick macroporous silicon layers were fabricated from n-type silicon (100) wafers by electrochemical etching in ethanoic solution of hydrofluoric acid. At constant anodization time and electrolytic concentration the effects of current density variation on porous silicon formation were investigated using scanning electron microscopy (SEM), x-ray diffraction (XRD) and photoluminescence (PL).

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Article ID

SPP-2010-6B-02

Section

Materials Physics

Published

2010-10-25

How to Cite

[1]
ROM Gonzales, RS Lopez, JJ Gimeno, RT Diocampo, NIF Cabello, AI Mabilangan, RG Dizon, and AS Somintac, Characterization of extremely thick macroporous silicon layer synthesized via electrochemical etching, Proceedings of the Samahang Pisika ng Pilipinas 28, SPP-2010-6B-02 (2010). URL: https://proceedings.spp-online.org/article/view/SPP-2010-6B-02.