Thickness dependence of the piezoelectric properties of zinc oxide film deposited on stainless steel via spray pyrolysis

  • Aldrin S Bendal Materials Science and Engineering Program, University of the Philippines Diliman and National Institute of Physics, University of the Philippines Diliman
  • Anthony Tuico Materials Science and Engineering Program, University of the Philippines Diliman and National Institute of Physics, University of the Philippines Diliman
  • Arven Cafe National Institute of Physics, University of the Philippines Diliman
  • Laureen Ballesteros Materials Science and Engineering Program, University of the Philippines Diliman and National Institute of Physics, University of the Philippines Diliman
  • Joybelle Lopez Materials Science and Engineering Program, University of the Philippines Diliman and National Institute of Physics, University of the Philippines Diliman
  • Elmer Estacio National Institute of Physics, University of the Philippines Diliman
  • Arnel Salvador National Institute of Physics, University of the Philippines Diliman
  • Armando Somintac National Institute of Physics, University of the Philippines Diliman

Abstract

Four different precursor solutions of 50 mL, 75 mL, 100 mL and 125 mL were used to deposit ZnO films on stainless steel at a substrate temperature of 300°C. The deposited ZnO film was confirmed using Raman spectroscopy and the thickness of the film was measured using reflectance spectroscopy. Piezoelectric material based on ZnO films were excited using an AC voltage on its longitudinal mode (d31). It was found out that ZnO film with the thickness of 897.89 nm obtained the highest RMS voltage output of 0.520 V and 0.8 V with resonant frequencies of 3.8 MHz and 6.41 MHz. Similar piezoelectric behavior observed for longitudinal mode (d31) compare to transversal mode (d33).

Published
2017-06-07
How to Cite
[1]
A. Bendal, A. Tuico, A. Cafe, L. Ballesteros, J. Lopez, E. Estacio, A. Salvador, and A. Somintac. Thickness dependence of the piezoelectric properties of zinc oxide film deposited on stainless steel via spray pyrolysis, Proceedings of the Samahang Pisika ng Pilipinas 35, SPP-2017-1E-02 (2017). URL: https://paperview.spp-online.org/proceedings/article/view/216.
Section
Condensed Matter and Materials Science