Application of Gerdien condenser to 13.56 MHz atmospheric-pressure plasma pen

Abstract

The applicability of Gerdien condenser as a diagnostic tool for atmospheric-pressure plasma (APP) was examined. Atmospheric pressure plasmas were generated at 25 W by supplying Ar as main gas and N2 as swirl gas both with the flow rates of 3 liters per minute (1pm). The ion mobilities calculated from the condenser I-V characteristics were identified to be those of O⁺, O₂⁺, Ar⁺, Ar⁺⁺ and N₂⁺. The ion densities of APP pen were determined to be in the range of 3.1 x 10⁵ to 3.5 x 10⁶ cm^-3.